ULVAC LR/HR/UR Series Dry Vacuum Pump

ULVAC LR/HR/UR Series Dry Vacuum Pump

ULVAC LR/HR/UR Series Dry Vacuum Pump

ULVAC LR/HR/UR Series Dry Vacuum Pump

ULVAC LR/HR/UR Series Dry Vacuum Pump

$4,230.77
Availability: In stock
SKU
PUMP-0852272

Packing and shipping

Packaging Regulation :

Wooden box

Delivery time :

7~14 days(About)

Conditions :

New and Genuine

How do you order?

A&S makes ordering GET Parts easy. Simply send a mail to Us. Instead of searching online and guessing which parts you need, our team will make sure you get the correct parts. We process and deliver your order fast, and always at a competitive price. Enjoy 5-star service!


1.IDENTIFY
Determine the parts you need. To ensure the correct parts are quoted, it's best to have the machine make and model, along with part numbers and photos of the nameplate if possible. Our team of professionals are here to help ensure you get the correct parts that fit and work the first time. Our sales team can also survey and help identify the parts you may need. Please email us to get started!

2.ORDER
Our professional internal sales teams and strong supply chain system will assist you to identify the right parts, and can recommend the most cost-effective solution for you. Our team of professionals will process your order, and ensure your order is correct the first time. With over 15 years in the business, we remove the guesswork and always deliver.

3.DELIVER
We'll ship or deliver your products as required, to your nominated location. If you're also located elsewhere, we'll identify the best shipping options for both price and delivery time. Email us now!

ULVAC LR Series Dry Vacuum Pump
ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
Feature:
Low temperature pumps : The LR series pump is designed for either load lock or PVD processes.
ULVAC's unique aluminum design allows for very uniform temperature distribution throughout the pump body : The HR aeries pump is designed for CVD and etch processes.
ULVAC UR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
Excellent helium pumping capability : Canned motor for safety and ease of maintenance
Power failure protection : Pump withstands power interruptions of up to 500ms duration.
Superior corrosion resistance : Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when
exposed to corrosive gasses.
Communication function : Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
CE marking is available : CE marking is available upon request.
Application:
Pump is designed for CVD or dry etching applications
Pump is designed for PVD, evaporation, or heat treatment processes
Reduction of exhaust time for LL chamber (LR series)
Pump is designed to handle process gasses that generate powder by products such as Si crystal growing furnaces
Backing pump for turbo-molecular pumps and mechanical booster pumps
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